Pressure Sensor Die MS7228A (0-28 bar) Harsh Environment

DESCRIPTION

The MS7228A is an absolute silicon micro-machined pressure sensor for harsh environments. A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a glass cap. The pressure, applied on the backside, is converted into electrical signals by piezo-resistors implanted in the silicon membrane. To improve sensor stability, a drilled glass is bonded on the backside. As the pressure port consists of glass and silicon, both stable in most chemicals, the MS7228A is suitable for media-resistive applications.

FEATURES

  • Hermetic pressure sensor
  • Media-resistive pressure sensor die
  • 0 to 28 bar
  • Small size 1.63 X 1.95 mm square
  • High Reliability, Low Cost
  • Linearity 0.05% typical
  • Temperature range from -40°C to +125ºC
  • Typical output span 150mV @ 5V

TYPICAL USES

  • Harsh environments
  • Absolute pressure systems
  • Braking systems
  • Tire pressure
  • Engine Controls
  • Diving computers

Data Sheet

MS7228A