Servoflo presents piezoresistive
Low Pressure Sensors from

Information about Silicon Microstructures

Silicon Microstructures, Inc. (SMI) was founded in 1991 as a commercial source of high-performance silicon pressure sensors and accelerometers. Its first product was a silicon sensor for very low-pressure applications that is still about 20 times more sensitive than competing parts. Throughout its history, SMI has applied high volume microstructure manufacturing processes and process control to a wide variety of sensors. As a result, SMI is a preferred low cost supplier that satisfies quality and delivery requirements for a wide variety of OEM customers.

In April 2001, a new milestone in SMI's development was reached when SMI became a subsidiary of Elmos Semiconductor, AG. The resulting close coupling and access to Elmos circuit and system design and 6-inch foundry launches SMI on a path to next generation products. These include higher performance, system level sensors and microstructures, wireless, RF and bus addressable microstructures, and further reduction in manufacturing costs.

In August 2002, SMI acquired the IC Sensors' wafer fab operations and wafer R&D group and relocated to Milpitas, California (See separate Press Release). This Milpitas facility is capable of processing 4 and 6 inch wafers and has advanced etch capabilities including Deep Reactive Ion Etching (DRIE). Prior to that, SMI operated its design, marketing and manufacturing center in Fremont, California and its wafer etch facility in Hawthorne, Ca.

By coupling advanced product designs with manufacturing in world class facilities, SMI is able to provide customers with product performance, engineering support, reliable manufacturing, high quality devices and low prices. SMI currently supplies high volume sensor elements into a number of industries.