Servoflo Corporation
75 Allen Street, Lexington, MA 02421
Phone: (781)862-9572
Fax: (781) 862-9244
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1. Pressure Sensor Die MS761 (0-1 bar) (Pressure Transducers/Pressure Dice)
DIAGRAM
GENERAL DESCRIPTION
The sensor element of the MS761 consists of a silicon micro-machined membrane with a Pyrex glass mounted under vacuum. Implanted resistors make use of the piezo-resistiv...
2. Pressure Sensor Die MS7212A (0-12 bar) (Pressure Transducers/Pressure Dice)
DIAGRAM
GENERAL DESCRIPTION
The MS7212A is an absolute silicon micro-machined pressure sensor for harsh environment. A vacuum reference cavity is sealed on top of the sensitive silicon membrane by ...
3. Pressure Sensor Die MS7310D (0-0.1 bar) (Pressure Transducers/Pressure Dice)
GENERAL DESCRIPTION
The MS7310D pressure sensor die is designed for low pressure sensor systems with the highest demands on resolution and accuracy. Its sensor element consists of a silicon micro-machined memb...
4. Pressure Sensor Die MS7801 (0-1 bar) (Pressure Transducers/Pressure Dice)
DIAGRAM
GENERAL DESCRIPTION
The sensor element of the MS7801 consists of a silicon micro-machined membrane with a Pyrex glass mounted under vacuum. Implanted resistors make use of the piezo-resisti...
5. Pressure Sensor Die MS767 (0-7 bar) (Pressure Transducers/Pressure Dice)
DIAGRAM
GENERAL DESCRIPTION
The sensor element of the MS767 consists of a silicon micro-machined membrane with a Pyrex glass mounted under vacuum. Implanted resistors make use of the piezo-resistiv...
6. Pressure Sensor Die MS7812 (0-12 bar) (Pressure Transducers/Pressure Dice)
DIAGRAM
GENERAL DESCRIPTION
The sensor element of the MS7812 consists of a small silicon micro-machined membrane with a Pyrex glass mounted under vacuum. Implanted resistors make use of the piezo-r...
7. Pressure Sensor Die MS7912 (0-12 bar) (Pressure Transducers/Pressure Dice)
DIAGRAM
GENERAL DESCRIPTION
The sensor element of the MS7912 consists of a silicon micro-machined membrane with a Pyrex glass mounted under vacuum. Implanted resistors make use of the piezo-resisti...
