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Pressure Sensor Die MS761 (0-1 bar) |
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DIAGRAM
GENERAL DESCRIPTION
The sensor element of the MS761 consists of a silicon micro-machined membrane with a Pyrex glass mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor (MS761A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor (MS761D) has a hole in the Pyrex glass at the backside of the sensor.
FEATURES
- 0 to 1 bar range (14.5 PSI)
- High sensitivity (240mV @ 5V)
- Absolute or Differential
- Small Die size 2.0 x 1.86 mm
- High Reliability, Low Cost
APPLICATIONS
- High resolution absolute sensor systems
- Engine Control
- Barometers, Altimeters
- Variometers
DOWNLOAD
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Download ms761.pdf