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Pressure Sensor Die MS7212A (0-12 bar) |
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DIAGRAM

GENERAL DESCRIPTION
The MS7212A is an absolute silicon micro-machined pressure sensor for harsh environment. A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a Pyrex cap. The pressure, applied on the backside, is converted in electrical signal by piezo-resistors implanted in the silicon membrane. To improve the sensor stability, a drilled Pyrex is bonded on the backside. As the pressure port consists of Pyrex and silicon, both stable in most of the chemicals, the MS7212 is suitable for media-resistive applications.
FEATURES
- Media resistive pressure sensor die
- 0 to 12 bar range (174 PSI)
- High linearity (0.05% typical)
- Absolute sensor of 1.96 x 2.1 mm
- High Reliability
- Low Cost
APPLICATIONS
- Harsh environments
- Absolute pressure sensor systems
- Braking systems
- Tire pressure
- Engine Control
- Diving Computers
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