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Pressure Sensor Die MS7912 (0-12 bar) |
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DIAGRAM
GENERAL DESCRIPTION
The sensor element of the MS7912 consists of a silicon micro-machined membrane with a Pyrex glass mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor (MS7912A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor (MS7912D) has a hole in the Pyrex glass at the backside of the sensor.
FEATURES
- 0 to 12 bar range (174 PSI)
- High linearity (0.05% typical)
- Absolute or Differential
- Small Die size 1.72 x 1.58 mm
- High Reliability, Low Cost
APPLICATIONS
- For absolute and differential pressure sensor systems
- Engine controls
- Diving computer
DOWNLOAD
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Download ms7912.pdf