Servoflo Corporation
75 Allen Street, Lexington, MA 02421
Phone: (781)862-9572
Fax: (781) 862-9244
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32. XFPN/XFGN-6 Series (Pressure Transducers/Signal Conditioned)
MODEL SELECTION
XFPN (Gauge) Package
(8 mm tube length)
Best used with silicon tubing or directly attached to manifold
NEW XFGN-6 Surface Mount Package
(6 mm tube le...
33. SMD Pressure Sensor MS5201D (Pressure Transducers/Uncompensated)
DIAGRAM
GENERAL DESCRIPTION
The MS5201D is a gage type SMD pressure sensor, suitable for applications which require relative (gauge) pressure measurements. The device consists of a silicon micromachined press...
34. X3GM-3/X3GM-6 Series (Pressure Transducers/Signal Conditioned)
MODEL SELECTION
X3GM-3 Surface Mount Package, 3 mm pressure port
X3GM-3 Surface Mount Package, 6 mm pressure port
FEATURES
3V Exc...
35. Pressure Sensor Die MS7310D (0-0.1 bar) (Pressure Transducers/Pressure Dice)
GENERAL DESCRIPTION
The MS7310D pressure sensor die is designed for low pressure sensor systems with the highest demands on resolution and accuracy. Its sensor element consists of a silicon micro-machined memb...
36. Pressure Sensor Die MS767 (0-7 bar) (Pressure Transducers/Pressure Dice)
DIAGRAM
GENERAL DESCRIPTION
The sensor element of the MS767 consists of a silicon micro-machined membrane with a Pyrex glass mounted under vacuum. Implanted resistors make use of the piezo-resistiv...
37. Pressure Sensor Die MS7801 (0-1 bar) (Pressure Transducers/Pressure Dice)
DIAGRAM
GENERAL DESCRIPTION
The sensor element of the MS7801 consists of a silicon micro-machined membrane with a Pyrex glass mounted under vacuum. Implanted resistors make use of the piezo-resisti...
38. FGM Series (Pressure Transducers/Uncompensated)
MODEL SELECTION
FGM-3 Surface Mount Package
(3 mm tube length)
Best used directly attached to manifold and sealed with an O Ring
FEATURES
Low cost, high reliability
Small, Surface Mount Se...
40. Ceramic Pressure Sensor ME506 (Pressure Transducers/Ceramic Transducers)
SHORT DESCRIPTION
Ceramic sensorME506 with flush mounted membranes. Pressure range: 1...20 bar
DESCRIPTION
The ME506 is a piezo r...
