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Servoflo Corporation
75 Allen Street, Lexington, MA 02421
Phone:  (781)862-9572
Fax: (781) 862-9244
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Pressure Sensor Die MS7212A (0-12 bar) PDF Print E-mail
DIAGRAM

MS7212A
GENERAL DESCRIPTION

The MS7212A is an absolute silicon micro-machined pressure sensor for harsh environment. A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a Pyrex cap. The pressure, applied on the backside, is converted in electrical signal by piezo-resistors implanted in the silicon membrane. To improve the sensor stability, a drilled Pyrex is bonded on the backside. As the pressure port consists of Pyrex and silicon, both stable in most of the chemicals, the MS7212 is suitable for media-resistive applications.
FEATURES

  • Media resistive pressure sensor die
  • 0 to 12 bar range (174 PSI)
  • High linearity (0.05% typical)
  • Absolute sensor of 1.96 x 2.1 mm
  • High Reliability
  • Low Cost
APPLICATIONS

  • Harsh environments
  • Absolute pressure sensor systems
  • Braking systems
  • Tire pressure
  • Engine Control
  • Diving Computers
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