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Pressure Sensor Die MS7310D (0-0.1 bar) |
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GENERAL DESCRIPTION
The MS7310D pressure sensor die is designed for low pressure sensor systems with the highest demands on resolution and accuracy. Its sensor element consists of a silicon micro-machined membrane bonded on a Pyrex glass support. The sensor signal is proportional to the pressure difference between back and front side of the membrane. The pressure is sensed by four implanted piezoresistors. The MS7310D exists in two versions: the first one with the bond pads on one side only, the other one with some bond pads on the opposite side.
FEATURES
- 0 to 100 mBar range (1.45 PSI)
- High linearity (typ. 0.7% @10kPa, 0.1% @1.6kPa)
- Differential sensor of 2.5 x 2.5 mm
- High Reliability, Low Cost
- Output Span of 90mV @5V
APPLICATIONS
- Washing machines
- Level indicators
- Industrial control
- Leak detection
DOWNLOAD
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Download ms7310d.pdf