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Pressure Sensor Die MS767 (0-7 bar) |
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DIAGRAM
GENERAL DESCRIPTION
The sensor element of the MS767 consists of a silicon micro-machined membrane with a Pyrex glass mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The MS767 is available as an absolute sensor (MS767A) where a sealed vacuum cavity underneath the membrane is used as reference pressure.
FEATURES
- 0 to 7 bar range (102 PSI)
- High sensitivity (392mV @ 5V)
- Absolute sensor
- Small Die size 1.62 x 1.48 mm
- High reliability, Low Cost
APPLICATIONS
- High resolution absolute sensor systems
- Tire pressure measurements
- Electronic scales
DOWNLOAD
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Download ms767.pdf