|
Pressure Sensor Die MS7812 (0-12 bar) |
|
|
|
|
DIAGRAM
GENERAL DESCRIPTION
The sensor element of the MS7812 consists of a small silicon micro-machined membrane with a Pyrex glass mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor MS7812A carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor MS7812D has a hole in the Pyrex glass at the backside of the sensor.
FEATURES
- 0 to 12 bar range (174 PSI)
- High linearity (0.05% typical)
- Absolute or Differential
- Small Die size 2.0 x 1.86 mm
- High Reliability, Low Cost
APPLICATIONS
- For absolute and differential pressure sensor systems
- Engine controls
- Diving computer
DOWNLOAD
|
Download ms7812.pdf