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FS6022 Bi-Directional Mass Flow Sensor for Medical Applications

The FS6022 are a MEMS flow sensor specially designed for medical equipment such as personal ventilators and CPAP machines for flow mointoring and control. 2 flow rates are available: 0-250 SLPM and 0-300 SLPM. The compact design enables a large dynamic flow range with flow resistance of less than 0.5 cm H2O/L/sec. This package withstands a maximum pressure of 0.2 MPa (29 psi) without compromising performance. The mechanical interface is standard ISO 22 mm combined male/femail medical connector that allows the sensor to be readily applied to equipment with minimal possible dead space.

The FS6022 requires a power supply of 5 VDC. FS6022A provides a linearized analog output of 0-5 VDC corresponding with flow rate from 0 to full-scale. The FS6022B provides an analog output of 2.5 - 5 VDC corresponding with 0-positive full scale flow rate and 2.5 - 0 VDC corresponds with 0-negative full-scale flow rate. It can also provide an RS232 output upon request.  

The sensors can be sterilized in medical liquides for reuse or hygienic purposes. The sensors can also be applied for various clean gas measurement with low cost and easy installation. 



  • Mass flow ranges from 0-250 SLPM or 0-300 SLPM. Bi-directional models available
  • Typical response time of 8 ms
  • Pressure rating up to 5 bar (73 psi)
  • Low power consumption
  • Accuracy of ±2.0% + 0.5 % FS
  • Linear analog output  



Contact Information

Servoflo Corporation
75 Allen Street
Lexington, MA 02421

Phone: (781) 862-9572
Fax: (781) 862-9244

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