Micro Flow Low Differential Air Pressure Sensors
DESCRIPTION
The MB-LPS1-01 Series of low pressure sensors measure differential air (or other non-corrosive gas) pressure, inferring differential pressure from nano-liters per second gas-flow through an integrated airflow channel having high flow impedance. The transducer is a MEMS-based thermo-anemometer on a monolithic silicon chip. Rejuster™ technology combined with CMOS circuitry provides on-chip integrated analog only compensation and conditioning electronics.
Rejustor™ technology produces electrically adjustable resistors and passive temperature compensation devices that are non-volatile (i.e. does not need power to hold its adjustment), and can be adjusted permanently, or, if required, re-adjusted at a later date.
Applications for the MB-LPS1-01 include HVAC, medical CPAP airflow sensing, fume hoods, biological safety cabinets, critical containment enclosures, leak detection, value-added transducers/transmitters and more.
|
Part # (R or N at end = | Measurement Range in Full Scale |
|---|---|
| MB-LPS1-01-010B5N or R |
±25Pa , ±0.1"H2O, ±0.0036PSI |
| MB-LPS1-01-010U5N or R |
0-25Pa, 0-0.1"H2O, 0-0.0036PSI |
| MB-LPS1-01-020B5N or R |
±50Pa , ±0.2"H2O, ±0.0072PSI |
| MB-LPS1-01-020U5N or R |
0-50Pa , 0-0.2"H2O, 0-0.0072 PSI |
| MB-LPS1-01-100B5N or R |
±250Pa , ±1.0"H2O, ±0.036 PSI |
| MB-LPS1-01-100U5N or R |
0-250Pa , 0-1.0"H2O, 0-0.036 PSI |
| MB-LPS1-01-200B5N or R |
±500Pa , ±2.0"H2O, ±0.0072 PSI |
| MB-LPS1-01-200U5N or R |
0-500Pa , 0-2.0"H2O, 0-0.0072 PSI |
FEATURES
- Linear Output
- High flow impedance in the range of tens to hundreds of kPa (ml/s)
- Dominates flow-impedance in series (in-line configurations)
- Minimizes flow-through in bypass (parallel, shunt) configurations
- Allows use of filters and connection hoses without losing calibration
- Rejustor™-based analog-only on-chip signal conditioning electronics to compensate (Offset, TC-Offset, Span, TC-Span)
- Response time of 1-2 ms typical
- Accuracy is ±2.5% full-scale (5°C to 55°C)
- Bi-directional models available
DATA SHEETS
- Data Sheet With Ratiometric Output: MB-LPS1-01-5R-V3-9-21-2009.pdf
- Data Sheet with Non-Ratiometric Output: MB-LPS1-01-5N-V3-9-21-2009.pdf
APPLICATION NOTES
- Linear Air Speed Measurement: MB-APP53.pdf
- Immunity to Dust: MB-APP51.pdf
- Measuring Differential Pressure: MB-APP52.pdf