Low Pressure Sensor Die MS7305D (0-0.05 bar)

DESCRIPTION

The MS7305 pressure sensor die is designed for low pressure sensor systems with the highest demands on resolution and accuracy. Its sensor element consists of a silicon micro-machined membrane bonded on a Pyrex glass support. The sensor signal is proportional to the pressure difference between back and front side of the membrane. The pressure is sensed by four implanted piezoresistors, giving a large output signal.

FEATURES

  • 0 to 0.05 bar
  • Small size 2.45 X 2.45 mm square
  • High Reliability, Low Cost
  • Linearity 0.3% typical
  • Temperature range from -40°C to +125ºC
  • High pressure burst capability (600 kPa)

TYPICAL USES

  • Washing machines
  • Level indicators

Data Sheet