The MS7305 pressure sensor die is designed for low pressure sensor systems with the highest demands on resolution and accuracy. Its sensor element consists of a silicon micro-machined membrane bonded on a Pyrex glass support. The sensor signal is proportional to the pressure difference between back and front side of the membrane. The pressure is sensed by four implanted piezoresistors, giving a large output signal.
Servoflo Corporation
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Lexington, MA 02421
Phone: (781) 862-9572
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