The MS52XX-YZ SMD pressure sensor series is designed for pressure sensor systems with highest demands on resolution and accuracy. The device consists of a silicon micromachined pressure sensor die mounted on a 7.6 x 7.6 mm ceramic carrier protected by a metal cap. The MS52XX-YZ can be delivered in the 'high sensitivity' option giving an output signal of up to 400 mV Full Scale signal at 5 V or a 'high linearity' option with an output signal of 150 mV Full Scale and an excellent linearity of typ. 0.05%.

Servoflo Corporation
75 Allen Street
Lexington, MA 02421
Phone: (781) 862-9572
Fax: (781) 862-9244