Mass Flow Sensors

POSIFA Microsystems Inc. specializes in providing high-performance and economical MEMS sensors to OEM customers worldwide. Utilizing innovative micro-system design and fabrication, Posifa’s MEMS Sensor Dies offer unprecedented levels of performance and robustness. Servoflo is offering their line of mass flow sensors as well as a Pirani vacuum sensor.

Contact Information

Servoflo Corporation
75 Allen Street
Lexington, MA 02421

Phone: (781) 862-9572
Fax: (781) 862-9244

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