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SM5XXX, 6XXX & 7XXX Ultra Low Pressure Sensors With Digital or Analog Output

DESCRIPTION

The SM5XXX, SM6XXX, and SM7XXX are ultra low pressure MEMS sensor families offering state of the art pressure transducer technology and a CMOS mixed signal processing technology to produce a digital, fully-conditioned, multi-order pressure and temperature-compensated sensor in JEDEC standard SOIC-16 packaging with dual ports (horizontal or vertical). It is available in compound gauge, symmetrical or asymmetrical differential configurations. With dual porting, a vacuum gauge measurement is possible to minimize altitude errors due to changes in ambient pressure.

 

  • SM5XXX: pressure range of 56 to 140 cmH2O (40 to 102 mmHg)
  • SM6XXX: pressure range of 21 to 56 cmH2O (15 to 41 mmHg)
  • SM7XXX: pressure range of 10 to 20 cmH2O (7.36 to 14.7 mmHg)

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FEATURES

  • 14 bit digital, pressure calibrated and temperature-compensated output
  • Accuracy ±1% full-scale
  • I2C digital interface or analog output
  • Compensated temperature range of -20°C up to 85°C
  • Insensitive to mounting orientation
  • Robust JEDEC SOIC-16 package

TYPICAL USES

  • Medical - sleep apnea, CPAP, ventilators, gas flow instrumentation, air flow monitors, negative pressure wound therapy
  • Industrial - airflow measurement, pneumatic gauges, pressure switches, safety cabinets, life sciences, gas flow
  • Sports equipment
  • Appliances

COMPARES FAVORABLY TO

  • Freescale MPXx4006, MPXx5050, MPXx6115, MPXV7002, MPXV5004

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Contact Information

Servoflo Corporation
75 Allen Street
Lexington, MA 02421

Phone: (781) 862-9572
Fax: (781) 862-9244

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