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Mass Flow & Vacuum Sensors

Datasheets for mass flow and vacuum sensors

Total 25 items Displaying 1 - 10 items
Title Description Download Files
AM1000 Series

MEMS environmental meter AM1000 measures air velocity, humidity and temperature


am1000.pdf
tariff-notification.pdf
ESRF-ESF

Mass Flow Sensor ESRF-ESF Data Sheet


esrf-esf.pdf
FS1015CL Datasheet

FS1015CL, 0-100 SLPM, 0-150 SLPM mass flow sensor


fs1015cl.pdf
tariff-notification.pdf
FS4001 Datasheet

FS4001 low mass flow sensor for  0 - 30 sccm up to 0 - 1000 sccm


fs4001.pdf
tariff-notification.pdf
FS4003 & FS4008 Datasheet

FS4003 & FS4008 Datasheet. Mass flow ranges from 0-2 SLPM up to 50 SLPM


fs4000.pdf
tariff-notification.pdf
FS5001 Datasheet

FS5001 mass flow sensor, 0-20 sccm up to 0-1000 sccm


fs5001.pdf
tariff-notification.pdf
FS6122 Datasheet

FS6122 mass flow sensor, +/- 250 SLPM


fs6122.pdf
tariff-notification.pdf
FS7002 Datasheet

FS7002 datasheet, air flow sensor, 0-10 m/s


fs7002.pdf
tariff-notification.pdf
FS8001/FS8003 Datasheet

FS8001 data sheet for 0-500 sccm


fs8001-fs8003.pdf
tariff-notification.pdf
FSP1000 Series

MEMS digital differential pressure sensor for up to ±2 inch H2O


fsp1000.pdf
siargo_product_catalog_102017.pdf

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