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Mass Flow & Vacuum Sensors

Datasheets for mass flow and vacuum sensors

Total 22 items Displaying 1 - 10 items
Title Description Download Files
AM1000 Series

MEMS environmental meter AM1000 measures air velocity, humidity and temperature

am1000.pdf tariff-notification.pdf
FS1015CL Datasheet

FS1015CL, 0-100 SLPM, 0-150 SLPM mass flow sensor

fs1015cl.pdf tariff-notification.pdf
FS4001 Datasheet

FS4001 low mass flow sensor for  0 - 30 sccm up to 0 - 1000 sccm

fs4001.pdf tariff-notification.pdf
FS4003 & FS4008 Datasheet

FS4003 & FS4008 Datasheet. Mass flow ranges from 0-2 SLPM up to 50 SLPM

fs4003-4008.pdf tariff-notification.pdf
FS5001 Datasheet

FS5001 mass flow sensor, 0-20 sccm up to 0-1000 sccm

fs5001.pdf tariff-notification.pdf
FS6122 Datasheet

FS6122 mass flow sensor, +/- 250 SLPM

fs6122.pdf tariff-notification.pdf
FS7002 Datasheet

FS7002 datasheet, air flow sensor, 0-10 m/s

fs7002.pdf tariff-notification.pdf
FS8000 Datasheet

FS8000 datasheet, 0-500 sccm or 0-6 SLPM

fs8000.pdf tariff-notification.pdf
FSP1000 Series

MEMS digital differential pressure sensor for up to ±2 inch H2O

fsp1000.pdf siargo_product_catalog_102017.pdf
MF4000 Data Sheet & User Manual

MF4000 mass flow meter data sheet & user manual

mf4000.pdf tariff-notification.pdf

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Servoflo Corporation
75 Allen Street
Lexington, MA 02421

Phone: (781) 862-9572
Fax: (781) 862-9244

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