Posifa Mass Flow Sensors

Our new line of mass flow sensors from Posifa MIcroSystems offer innovative and low cost solutions based on thermal flow measurement. We are also offering a vacuum sensor also based on thermal conductivit.

PAV1000 Series Air Velocity Sensor

The PAV1000 was designed as an economical high-performance air velocity sensor for thermal management & HVAC systems. Unlike thermistor-based solutions, the Posifa MEMS sensor core is minimally affected by ambient temperature changes and provides instant real-time feedback on air velocity speeds. The PAV1000 features Posifa's third-generation thermal flow die, benefiting from the latest innovations in microfabrication.

PMF2000 Series Mass Flow Sensor

The PMF2000 Series of mass airflow sensors incorporate the latest MEMS and microelectronics innovations. The sensor die uses a pair of thermopiles to detect changes in temperature gradient caused by mass flow, delivering ultra-low noise-to-signal, and unsurpassed repeatability. The "solid-state" thermal isolation on the sensor die eliminates the need for surface cavities or fragile membranes, used in competing solutions, making the sensor resistant to clogging and pressure shock. The sensor's internal signal conditioning circuitry leverages an off-the-shelf microcontroller, providing proven reliability and low cost.

PMF4000 Series Mass Air Flow Sensor

The PMF4000 Series of mass air flow sensors covers the ranges from 50 SLM to 300 SLM. The sensors are full calibrated and compensated over the temperature range of 0°C to 50°C. The linearized analog output of 1-5V provides maximum flexibility and ease-of-use. Like other PMF mass flow sensors, the PMF4000 incorporates the latest MEMs and microelectronics innovations.

PMF6000 Series Mass Air Flow Sensor for Bypass Assemblies

The PMF6000 is developed specifically for use in bypass assemblies by customers wishing to design their own flow body and restrictor element. By utilizing the linearized factory calibration from Posifa, customers can create master calibration curves specific to their custom bypass design with minimal additional corrections in the production process. The PMF6000 comes with a standardized package for manifold mounting. The series includes the PMF6000V for a voltage output and PMF6000D for a digital I2C output. Two flow ranges are available: 0-1000 sccm and 0-6000 sccm.

PMF8300 Series Mass Air Flow Sensor for Medical Devices & Industrial Applications

The PMF8300 features Posifa's third generation flow die, benefiting from the latest innovations in microfabrication. The sensor die, with its silicon carbide protective film, is robust against water condensation while allowing the highest level of sensitivity and minimizing the cost of packaging. The PMF8300 Mass Air Flow Sensor is designed for flow rates from 0-15 SLPM up to 0-100 SLPM and provides both analog voltage and digital I²C outputs.

PVC1000 Series Pirani Vacuum Sensor

The PVC1000 Series of MEMS Pirani Vacuum Sensors offer a breakthrough vacuum measurement solution that enhances miniaturization while delivering ultra-low power consumption, long lifetime, minimal field maintenance, and low cost. Based on the principal that the thermal conductivity of gases is proportional to pressure in the low vacuum range, the Posifa sensors measure minute changes in resistance to a heated element resulting from heat transfer to the surrounding gas.

Pressure Sensors, Mass Flow Sensors & Oxygen Sensors is our Experience

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