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ESCP3-M14 Capacitive Board Level Pressure Sensor High Accuracy 0.5% FS

ESCP3-M14 Series is a capacitive pressure sensor with world class resolution and accuracy. The gauge or differential pressure sensor has a solution of less than 15┬Ábar with SPI and I2C interfaces. The sensor includes a high-resolution CDC converter to digitize the signal. The digital output is fully calibrated and temperature-compensated. A low phase noise oscillator is also integrated, eliminating the need for any external components. Different power modes are available enabling low power operation, and the end user can customize/optimize performance. The ESCP3-M14 is a capacitive pressure sensor with excellent long-term stability and high overpressure range. The sensor is incorporated in a standard 8-pin DIP package with a variety of pneumatic port options.


  • PCB mountable
  • High accuracy of 0.5% FS including repeatability, hysteresis and thermal effects
  • High resolution
  • Standard footprint
  • Various pressure ranges include: 10, 50, 100, 200, 400, 500, 750 & 1000 mbar
  • Overpressure at high side of at least 4 bar independent of the sensor pressure range


  • Medical
  • Consumer goods
  • HVAC
  • Filtration systems
  • Process automation
  • Gas flow
  • Flow switch


Contact Information

Servoflo Corporation
75 Allen Street
Lexington, MA 02421

Phone: (781) 862-9572
Fax: (781) 862-9244

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