Mass Flow Sensors

Mass Flow Sensors

Servoflo is expanding its offering of mass flow sensors that are high-performance and economical to OEM customers. These sensors are high performing and better cost than alternative suppliers. 

18 Items found

FS5002 mass flow sensor

The FS5002 are mass flow sensors for gas. They come in various calibrations from 50 sccm up to 1000 sccm with both analog and digital outputs.

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FS4100 general purpose mass flow sensor

The FS4100 are general-purpose mass flow sensors with various ranges from 2 SLPM up to 50 SLPM, with analog and digital outputs.

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FS1100 Mass Flow Sensors for Medical Ventilators

The FS1100 sensors measure the mass flow rates with a full scale up to 250 SLPM with a dynamic range of 100:1, and a temperature measurement of -20°C to 85°C. It has a maximum pressure rating of 2 bar (30 psi). Flow range selections include reverse to forward flow rates.

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MF/FS4308 Mass Flow Sensors

The MF/FS4308 mass flow sensors are for general purpose gas flow monitoring and control applications. This series covers a wide dynamic flow range with a working pressure rating of up to 1 MPa, and a temperature range from -10°C to 55° C. 

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MF/FS4700 Mass Flow Sensors

The MF/FS4700 mass flow sensors are for general purpose gas flow monitoring and control applications. This series covers a wide dynamic flow range with a working pressure rating of up to 1 MPa, and a temperature range from -10°C to 55° C. 

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MF/FS4000 Mass Flow Sensors

The MF/FS4000 mass flow sensors are manufactured using Siargo's proprietary MEMS flow sensor and packaging technology. The products are designed for reliability with excellent performance in targeted applications. The sensors are housed in 3 mm and 8 mm pipes with maximum flow rates of 5 SLPM and 50 SLPM. 

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FS4001 MEMS Mass Flow Sensor

The FS4001 mass flow sensors are manufactured using Siargo's proprietary MEMS flow sensor and packaging technology. The sensors are specially designed for low flow rates from 0-30 sccm up to 0-1000 sccm. With a high overpressure of 5 bar (73 psi), the FS4001 can be used in a wide range of applications including instrumentation (such as mass spectrometry), leak detection, process control, gas flow metrology and medical applications. The FS4001 requires a power supply of 8-18 VDC and provides an analog (0.5 to 4.5 VDC) and/or digital user interface (RS232). The calibration is generally performed with nitrogen at 20 °C and 101.325 kPa pressure rating. Calibration with other gases and conditions is available upon request.

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FS5001B MEMS Mass Flow Sensor for Manifold Mounting

The FS5001L mass flow sensors are manufactured using Siargo's proprietary MEMS flow sensor and packaging technology. The sensors are specially designed for flow rates up to 6 SLPM. The FS5001B can be used in a wide range of applications including mass flow metering for process control, leak detection, HVAC, gas flow metrology, and medical applications. The FS5001L requires a power supply of 8-24 VDC and provides an analog (0.5 to 4.5 VDC) and/or digital user interface I2C. Special calibrations are available upon request.

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FS6122 Bi-Directional Medical Respiratory Sensor

The FS6122 is a medical respiratory sensor to measure from -250 to +250 SLPM with a linear analog output or I2C output.  A gauge pressure sensor is integrated into the FS6122 with a range of -5 to +40 cc H2O with a linear analog or I2C output. 

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FS7002 Mass Flow/Filter Clog Sensor

The FS7002 are mass flow sensors designed to detect filter clogging. The sensors are designed for open space air flow measurement for monitoring the airflow status behind any air filter. The air velocity passes through the sensor via a specially designed venturi channel to proivde the stability of the air flow for the measurement. The compact design of the sensor provides easy installation and minimal obstruction of the air pathway. Typical applications include but are not limited to filter clog sensing in an intelligent air filter in an LCD projector and other electronics products, ceiling filter fans modules, ventilation duct flow or fan motor status.

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FS8001/FS8003 Small Mass Flow Sensor

The FS8001 mass flow sensors have a fast response time of 5 ms and are designed for filter clogging. The FS8001 is for 0-500 sccm and has a nonlinear analog voltage. The FS8003 is for 0-6 SLPM. 

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AM1000 Series MEMS Environmental Meter

The AM1000 Series is designed for air velocity measurement in a closed conduit or open space, with optional temperature and humidity sensing data (AM1100 model). The sensing elements are made on a specially designed MEMs structure that enhances the measurement accuracy and response time while lowering the power consumption. The RS485 (Modbus) and Bluetooth LE options are ready for networking or remote communication. This format is ideal for residential HVAC or smart home applications.

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FS1015 CL Mass Flow Sensors

The FS1015CL mass flow sensors are manufactured using proprietary MEMS flow sensor and packaging technology. The sensors are specially designed for medical equipment such as ventilators for flow monitoring and control. 2 flow rates are available, 0-100 SLPM and 0-150 SLPM. The compact package design enables a large dynamic flow range with a pressure drop of 1300 Pa (about 13 cm H2O). This package withstands a maximum pressure of 29 psi without compromising performance. 

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MF5600 MEMS Mass Flow Meter

The MF5600 mass flow meters are designed for general purpose yet precise industrial gas measurement, monitoring or control. The design is for applications where the display must be placed separately from the meter body or flow channel.

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MF5700 MEMS Mass Flow Meter

The MF5700 mass flow meters come in 2 models. The MF5706 has a flow range of 0-10 SLPM or 0-25 SLPM. The MF5712 has a range of 0-200 SLPM. The MF5700 features cost-effective ultra low power operating on 4 AA batteries. The portable design has excellent exchangeable mechanical adaptors, easy data accessible and user programmable capabilities. The internal data storage can also help for many industrial on-site applications. The meters can be customized for various general-purpose flow applications. LCD output is included along with an optional RS485 output.

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MFG Mass Flow Meters

The MFG Series mass flow meters are powered by battery and offer a wide dynamic range while mainiting the high sensitivity at low flows for gas monitoring and measurement. The meters have RS485 Modbus communication interface that is ready for remote data logging or networking. Storage designed in the control circuitry allows the user to program the records of the flow status  which can be transmitted via the network or downloaded with a handheld or personal computer.

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MF5000 MEMS Mass Flow Meter

MF5000 series mass flow meters are specially designed for small pipe flow monitoring and feature an extremely low pressure loss compared to the traditional by-pass thermal mass flow meters in this application scope. The accuracy of the meters are generally ±(1.5+0.5FS)% or better depending on the requests. The meters can work at an environment of -20 to 60°C and pressure up to 1.5 MPa. Applications include semiconductor gas process monitoring and control, hospital oxygen gas monitoring, etc.

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MF5100 MEMS Mass Flow Meter

The MF5100 is a state of the art MEMS mass flow sensor with limited gas automatic recognition capability and optional battery power operation. It provides a variety of output options with further customization available.

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