The MF5100 is a state of the art MEMS mass flow sensor with limited gas automatic recognition capability and optional battery power operation. It provides a variety of output options with further customization available.
MF5100 mass flow meter comes in 3 different variations:
- MF5106 for 0-30 SLPM
- MF5108 for 0-50 SLPM
- MF5110 for 0-100 SLPM
Features
- Directly sense mass flow using thermal mass flow principle
- Proprietary MEMs sensor package design for better reliability
- D cell lithium ion battery option or 12-24 VDC external power
- Weight of less than 1 kg
- Dimensions of 132 mm x 41 mm x 134 mm
- Output options include RS485, 4-20 mA, or 0-5V analog output