Mass Flow Meters

MF5200 Oxygen Mass Flow Meter

The MF5200 Series oxygen flow meters are designed specifically for oxygen metering systems in medical equipment. These meters are operated with the standard industrial user interfaces (RS485), and user-defined alarm functions for better monitoring or control over the network. The off-the-shelf products (MF5212 and MF5219) are for gas flow measurement of 0-300 SLPM and 0-800 SLPM respectively.


  • Integrated MEMS mass flow sensors and pressure sensors
  • Detachable display that can be placed away from the flow channel via a specially designed cable (display is optional)
  • Supply voltage of 8-24 VDC
  • LED display for both instant flow rate and flow accumulation
  • Standard RS485 for remote data communication
  • Hygienic stainless steel body ready for oxygen metering
  • The MF5212 has an inner pipe diameter of 12 mm
  • The MF5219 has an inner pipe diameter of 19 mm