Posifa Flow & Vacuum Sensors

PMF8300 Series Mass Air Flow Sensor for Medical Devices & Industrial Applications

The PMF8300 features Posifa's third generation flow die, benefiting from the latest innovations in microfabrication. The sensor die, with its silicon carbide protective film, is robust against water condensation while allowing the highest level of sensitivity and minimizing the cost of packaging. The PMF8300 Mass Air Flow Sensor is designed for flow rates from 0-15 SLPM up to 0-100 SLPM and provides both analog voltage and digital I2C outputs.


  • Various flow ranges from 0-15 SLPM to 0-100 SLPM
  • Flow repeatability of 0.5% FS
  • Long-term stability with minimal null drift
  • Solid-state sensing core (no surface cavity or fragile membrane, resistant to clogging and pressure shock
  • Fast response time of less than 5 ms
  • Supply voltage of 5VDC 
  • Linear analog output of 0.5 to 4.5 VDC or digital I2C output
  • Overpressure of 50 psi


  • Medical respirators, ventilators, oxygen concentrators & anesthesia equipment
  • Leak detectors
  • Spectroscopy
  • Fuel cell control
  • Mass flow controllers