Siargo Mass Flow Sensors

FS1015 CL Mass Flow Sensors

The FS1015CL mass flow sensors are manufactured using proprietary MEMS flow sensor and packaging technology. The sensors are specially designed for medical equipment such as ventilators for flow monitoring and control. 2 flow rates are available, 0-100 SLPM and 0-150 SLPM. The compact package design enables a large dynamic flow range with a pressure drop of 1300 Pa (about 13 cm H2O). This package withstands a maximum pressure of 29 psi without compromising performance. 

The mechanical interface is the standard ISO 15 mm medical connection that allows the sensor to be readily applied to ventilators and anesthesia equipment.

The FS1015CL requires a power supply of 5 V and provides a linearized analog output of 0.5 to 4.5 VDC corresponding to a flow rate from zero to full-scale. A digital interface via I2C is available to allow customers to store and retrieve calibration data or other relevant information. A fast response time of 8 ms allows users to monitor the flow rate nearly instantly.

The sensors can be sterilized in medical liquids for reuse. Other clean gases can be measured with the FS1015CL.


  • 0-100 SLPM or 0-150 SLPM
  • Fast response time of 8 ms
  • Low power consumption
  • Designed specifically for medical equipment
  • Small form factor  of 70 x 44 x 25 mm
  • Accuracy of ±2% + 0.5 FS