Siargo Mass Flow Sensors

FS8001/FS8003 Small Mass Flow Sensor

The FS8001 mass flow sensors have a fast response time of 5 ms and are designed for filter clogging. The FS8001 is for 0-500 sccm and has a nonlinear analog voltage. The FS8003 is for 0-6 SLPM. 


  • 0-500 sccm for FS8001
  • 0-6 SLPM for FS8003
  • Typical response time of  less than 3 ms
  • Non-linear analog output
  • Small form factor
  • Excellent for detecting filter blockage