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Please read this special announcement about Servoflo's distribution business

SM5XXX, 6XXX & 7XXX Ultra Low Pressure Sensors With Digital or Analog Output
Pressure Medium: Air/Gas
Sensor Type: Gauge, Differential
Supply Voltage: Under 5V
Output Signal: Digital
Pressure Range: Under 4” H2O, 4” H2O to 3 psi
Kind: Board Level

The SM5XXX, SM6XXX, and SM7XXX are ultra low pressure MEMS sensor families offering state of the art pressure transducer technology and a CMOS mixed signal processing technology to produce a digital or analog, fully-conditioned, multi-order pressure and temperature-compensated sensor in JEDEC standard SOIC-16 packaging with dual ports (horizontal or vertical). 

It is available in compound gauge, symmetrical or asymmetrical differential configurations. With dual porting, a vacuum gauge measurement is possible to minimize altitude errors due to changes in ambient pressure.

  • SM5XXX: pressure range of 56 to 140 cmH2O (40 to 102 mmHg) - SM5X91 has digital & analog output & SM5X21 is digital only
  • SM6XXX: pressure range of 21 to 56 cmH2O (15 to 41 mmHg) - SM6x91 has digital & analog output & SM6x21 is digital only
  • SM7XXX: pressure range of 10 to 20 cmH2O (7.36 to 14.7 mmHg) - SM7X91 has digital & analog output & SM7X21 is digital only


  • 14 bit digital, pressure calibrated and temperature-compensated output
  • Accuracy ±1% full-scale
  • I2C digital interface or analog output
  • Compensated temperature range of -20°C up to 85°C
  • Insensitive to mounting orientation
  • Robust JEDEC SOIC-16 package

Typical Uses

  • Medical - sleep apnea, CPAP, ventilators, gas flow instrumentation, air flow monitors, negative pressure wound therapy
  • Industrial - airflow measurement, pneumatic gauges, pressure switches, safety cabinets, life sciences, gas flow
  • Sports equipment
  • Appliances

Compares Favoravly to

  • Freescale MPXx4006, MPXx5050, MPXx6115, MPXV7002, MPXV5004